Hitachi Aerosurf ASEM

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Hitachi developed a new concept in scanning electron microscopes, the AeroSurf. The hybrid tabletop atmospheric SEM (ASEM) has an extremely thin membrane which separates the evacuated column and atmospheric-pressure chamber, enabling the observation of typically difficult specimens, such as bulk or wet samples, in their natural state.

Electron Gun Pre-centered cartridge filament
Detector High-sensitivity Semiconductor BSE Detector
Accelerated Voltage 5 kV / 15 kV
Magnifications 15 x to 60,000 x (240,000 x with digital zoom)
Observation Pressure Atmospheric mode (105 Pa) with the membrane
Negative pressure mode (approx. 103 Pa to 105 Pa) with the membrane
Vacuum mode (approx. values between few Pa to several tens Pa) without membrane
Max Sample Size 55 mm in diameter
Dimensions Main unit: 330 (W) x 687 (D) x 565 (H)  mm, 67.0 kg
Control unit: 220 (W) x 368 (D) x 235 (H)  mm, 11.8 kg
Diaphragm pump: 145 (W) x 256 (D) x 217 (H)  mm, 4.5 kg (x2)