Atomic Force Microscope
General purpose small AFM equipped with a high resolution sensor.
The Hitachi AFM5100N is a compact, multi-functional AFM with self-sensing cantilevers requiring no laser adjustment. Simply place the sample and the self-detecting holder and the AFM5000II control software with its one-click, auto-adjust measurement will do the rest.
The self-detecting lever with built-in sensor is a cantilever piezo-resistance sensor combined through MEMS technology. The cantilever uses components mounted on boards combined with wiring. Replacement of the cantilever can be easily performed by even a novice user.
|Detection method||Self-detection method (Optic lever method)||(Selectable)|
|Sample size||Maximum 35mm, Thickness 10mm (exclusive jig usage time 20mm)|
|Scan range (In-plane/Vertical)||20um/ 1.5um, 100um/ 15umH, 150um/ 5umH, 110um/ 6umH
(Closed loop control)
|Measurement functions||DFM (Dynamic Force Mode), PM (Phase mode)|
|Positioning microscope||Top observation USB camera, Zoom microscope, Optic microscope,
|Vibration isolation mechanism||Simple isolation block, Bench top vibration-isolation stand,
|Operation window||Flow chart form navigation system|
|Surface roughness measurement||Surface roughness JIS standard (JIS R 1683:2007)|
|Function expandability||AFM, STM, SIS、FFM, LM-FFM, VE-AFM/DFM, Adhision, CURRENT, KFM, PRM, SNDM, SSRM, EFM, MFM|