Hitachi AFM5100N
Atomic Force Microscope
General purpose small AFM equipped with a high resolution sensor.
The Hitachi AFM5100N is a compact, multi-functional AFM with self-sensing cantilevers requiring no laser adjustment. Simply place the sample and the self-detecting holder and the AFM5000II control software with its one-click, auto-adjust measurement will do the rest.
The self-detecting lever with built-in sensor is a cantilever piezo-resistance sensor combined through MEMS technology. The cantilever uses components mounted on boards combined with wiring. Replacement of the cantilever can be easily performed by even a novice user.
Specifications
| Detection method | Self-detection method (Optic lever method) | (Selectable) |
| Sample size | Maximum 35mm, Thickness 10mm (exclusive jig usage time 20mm) | |
| Scan range (In-plane/Vertical) | 20um/ 1.5um, 100um/ 15umH, 150um/ 5umH, 110um/ 6umH (Closed loop control) |
(Selectable) |
| Measurement functions | DFM (Dynamic Force Mode), PM (Phase mode) | |
| Positioning microscope | Top observation USB camera, Zoom microscope, Optic microscope, Metal microscope |
(Selectable) |
| Vibration isolation mechanism | Simple isolation block, Bench top vibration-isolation stand, frame-isolation stand |
(Selectable) |
| Operation window | Flow chart form navigation system | |
| Surface roughness measurement | Surface roughness JIS standard (JIS R 1683:2007) | |
| Function expandability | AFM, STM, SIS、FFM, LM-FFM, VE-AFM/DFM, Adhision, CURRENT, KFM, PRM, SNDM, SSRM, EFM, MFM |