Hitachi AFM5500M
Scanning Probe Microscope
The AFM5500M is a SPM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation, and accuracy, as well as correlation for AFM/SEM investigations.
Specifications
Stage | Automated, fully addressable 100 mm (4 inch) stage Travel range: XY ±50 mm (2 inch), Z ≥21 mm Minimum step size: XY 2 µm, Z 0.04 µm |
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Sample size | Diameter:100 mm (4 inch) Thickness: 20 mm Weight: 2 kg |
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Scan range | 200 µm x 200 µm x 15 µm (XY: Closed loop control, Z: Displacement sensor) | |
RMS Noise Level | ≤0.04 nm (High-resolution mode) | |
Repeatability | XY: ≤15 nm(3σ, measuring 10 µm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth) | |
XY Orthogonality | ±0.5° | |
Bow | ≤2 nm/50 µm | |
Detection | Optical lever (Low-coherence light) | |
Top-View Optical Microscope | Zoom magnification: x1 ~ x7 Field of vision: 910 µm x 650 µm ~130 µm x 90 µm Monitor magnification: x465 ~ x3255 (27 inch monitor) |
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Anti-Vibration | Desktop active anti-vibration 500 mm(W) x 600 mm (D) x 84 mm (H), approximately 28kg | |
Soundproof Cover | 750 mm(W) x 877 mm (D) x 1400 mm(H), approximately 237 kg | |
Size | 400 mm(W) x 526 mm(D) x 550 mm(H), approximately 90 kg |